books.google.co.uk - Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials,...http://books.google.co.uk/books/about/Etching_in_Microsystem_Technology.html?id=soHlnnTJ-qkC&utm_source=gb-gplus-shareEtching in Microsystem Technology
