Design and Technology of Integrated Circuits

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Wiley, May 11, 1990 - Technology & Engineering - 246 pages
Using an interdisciplinary approach to the design and technology of integrated circuits on silicon, it focuses on the fabrication of technology and its interaction with circuit design and layout. Provides a broad, coherent understanding of fabrication procedures including compositions, formulations and processing. Covers optimization of component design for use in particular microelectronic applications. Also examined are applications of integrated circuit technology. Provides an historical review of components, materials, technologies and includes end-of-chapters bibliographies, worked examples and tutorial exercises.

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The Preparation of Slices of Electronic Grade
The Characterization of Materials
Metallization Systems A

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