Vacuum Engineering Calculations, Formulas, and Solved ExercisesThis book was written with two main objectives in mind - to summarize and organize the vast material of vacuum technology in sets of useful formulas, and to provide a collection of worked out exercises showing how to use these formulas for solving technological problems. It is an ideal reference source for those with little time to devote to a full mathematical treatment of the many problems issued in vacuum practice, but who have a working knowledge of the essentials of vacuum technology, elementary physics, and mathematics. This book employs a problem-solving approach throughout, providing the methodology for computing vacuum parameters. References and solved exercises are appended to the end of each chapter. |
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83.14 mbar liters aperture argon atm cm³ atmospheric pressure C₁ calculated from Eq circular cross section cm² cm³ mol-1 cm³ s-¹ coefficient constant cylinder diffusion pump dimensionless Dushman Equation ergs evacuated Exercise flow of gas flow rate g mol-1 g mol−¹ gas flow gas load gases H₂ K-1 see Table laminar flow leak listed in Table liters mol-1 K-1 liters s-1 m³ h-¹ manometer mass flow rate mbar liters s¹ mean free path mol-¹ see Table mol¹ molar mass molec molecular conductance molecular flow Molecular transmission probability molecules N₂ number density number of molecules P₁ P₂ partial pressure pipe of uniform port pumpdown pumping speed rate of gas Solution species of gas specific outgassing rate Substitute system of units T₁ T₂ temperature throughput Torr liters transmission probability Pr universal gas constant vacuum components vacuum pump vacuum system values velocity vessel viscous volume Þ₁