Quantitative Microbeam AnalysisA.G Fitzgerald, B.E Storey, D.J Fabian Quantitative Microbeam Analysis provides a comprehensive introduction to the field of quantitative microbeam analysis (MQA). MQA is a technique used to analyze subatomic quantities of materials blasted from a surface by a laser or particle beam, providing information on the structure and composition of the material. Contributed to by international experts, the book is unique in the breadth of microbeam analytical techniques covered. For each technique, it develops the theoretical background, discusses practical details relating to choice of equipment, and describes the current advances. The book highlights developments relating to Auger electron spectroscopy in scanning electron microscopes and transmission electron microscopes and advances in surface analytical imaging and accelerated ion beam-surface interactions. |
Contents
Quantification in AES and XPS | 1 |
Surface Analytical Imaging | 43 |
Electronic Structure and Electron Spectroscopy | 95 |
Auger Electron Spectroscopy in the STEM | 121 |
Electron EnergyLoss SpectroscopyEELS | 145 |
Light Element Microanalysis and Imaging | 169 |
Data Analysis and Processing | 189 |
Microscopy and Microanalysis of Insulating Materials | 203 |
Applications of Surface Interface and Thin Film Analysis in | 399 |
IonInduced Auger Electron Emission From Solids | 419 |
a list of Acronyms 459 | |
Contents | 1 |
Surface Analytical Imaging 43 | 43 |
Electronic Structure and Electron Spectroscopy 95 | 95 |
Auger Electron Spectroscopy in the STEM 121 | 121 |
Electron EnergyLoss SpectroscopyEELS 145 | 145 |
Electron Probe Xray Microanalysis | 247 |
Energy Dispersive XRay Analysis EDX in the TEMSTEM | 275 |
Analysis and Imaging by ProtonInduced XRay Emission PIXE | 303 |
IonBeam Analytical TechniquesRutherford Backscattering Elastic | 329 |
Quantitative Analysis of Solids by SIMS and SNMS | 351 |
Static SIMS | 375 |
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Common terms and phrases
aberration absorption analysis angle aperture atomic number Auger electron spectroscopy Auger electrons Auger images background backscattering beam energy binding energy bombardment bremsstrahlung Briggs caesium calculations channel composition concentration correction cross-section detection detector effects elastic scattering electron beam electron energy Electron Microscopy elements emission emitted energy loss EPMA Equation excited experimental factor function incident electron inelastic instrument intensity interaction ionisation kinetic energy laser layer lens magnetic mass mass spectrometry material matrix measured metal method microanalysis parameters particles peak photoelectron photoemission photon Phys Rev PIXE pixel probe projectile Prutton quantitative ratio resonant sample scanning scatter diagram Seah M P secondary electrons secondary ions sensitivity shown in Figure signal silicon SIMS SNMS solid spatial resolution specimen spectra spectrometer spectroscopy spectrum sputtering yield stopping power structure Surf Interface Anal surface surface normal techniques thickness Trebbia University of Dundee values Wittmaack x-ray