Molecular Beam Epitaxy: From Research to Mass ProductionMohamed Henini Molecular Beam Epitaxy (MBE): From Research to Mass Production, Second Edition, provides a comprehensive overview of the latest MBE research and applications in epitaxial growth, along with a detailed discussion and ‘how to’ on processing molecular or atomic beams that occur on the surface of a heated crystalline substrate in a vacuum. The techniques addressed in the book can be deployed wherever precise thin-film devices with enhanced and unique properties for computing, optics or photonics are required. It includes new semiconductor materials, new device structures that are commercially available, and many that are at the advanced research stage. This second edition covers the advances made by MBE, both in research and in the mass production of electronic and optoelectronic devices. Enhancements include new chapters on MBE growth of 2D materials, Si-Ge materials, AIN and GaN materials, and hybrid ferromagnet and semiconductor structures.
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Contents
1 | |
27 | |
37 | |
55 | |
73 | |
From the Basics of Growth to Device Applications | 95 |
7 Molecular Beam Epitaxy of AlGaN Nanowire Heterostructures and Their Application in Ultraviolet Optoelectronics | 115 |
8 Kinetics of MetalRich PA Molecular Beam Epitaxy of AlGaN Heterostructures for MidUV Photonics | 135 |
19 Molecular Beam Epitaxy of Hybrid Topological InsulatorFerromagnetic Heterostructures and Devices | 421 |
An Overview | 443 |
21 Molecular Beam Epitaxy of Graphene and Hexagonal Boron Nitride | 487 |
22 Molecular Beam Epitaxy of Transition Metal Dichalcogenides | 515 |
23 Growth and Characterization of FullereneGaAs Interfaces and C60Doped GaAs and AlGaAs Layers | 533 |
Interfaces and Epitaxial Growth | 551 |
25 Molecular Beam Epitaxy of Wide Gap IIVI Laser Heterostructures | 571 |
26 THz Quantum Cascade Lasers | 597 |
9 InAsBi Materials | 181 |
10 Molecular Beam Epitaxy of GaAsBi and Related Quaternary Alloys | 197 |
Fundamentals Lowdimensional Structures and Device Applications | 211 |
12 SiteControlled Epitaxy of InAs Quantum Dots on Nanoimprint Lithography Patterns | 277 |
13 Droplet Epitaxy of Nanostructures | 293 |
14 LayerbyLayer Growth of Thin Films of Ternary Alloys of IIVI Semiconductors by Submonolayer Pulsed Beam Epitaxy SPBE | 315 |
15 Molecular Beam EpitaxyGrown Wide Band Gap IIVI Semiconductors for Intersubband Device Applications | 327 |
16 Zinc Oxide Materials and Devices Grown by Molecular Beam Epitaxy | 343 |
17 Epitaxial Systems Combining Oxides and Semiconductors | 377 |
18 Nanoscale Engineering of Gebased Diluted Magnetic Semiconductors for RoomTemperature Spintronics Application | 403 |
27 GaSb Lasers Grown on Silicon Substrate for Telecom Applications | 625 |
28 GaPSiBased Photovoltaic Devices Grown by Molecular Beam Epitaxy | 637 |
29 Systems and Technology for ProductionScale Molecular Beam Epitaxy | 649 |
30 Mass Production of Optoelectronic Devices | 677 |
31 Mass Production of Sensors Grown by Molecular Beam Epitaxy | 693 |
32 Molecular Beam Epitaxy as a Mass Production Enabling Technology for ElectronicOptoelectronic Devices | 721 |
Present and Near Future | 741 |
751 | |
Back Cover | 775 |